Title:
Chamber device
Document Type and Number:
Japanese Patent JP6021422
Kind Code:
B2
Inventors:
Shinji Nagai
Wakabayashi Osamu
Yutaka Shiraishi
Junichi Fujimoto
Wakabayashi Osamu
Yutaka Shiraishi
Junichi Fujimoto
Application Number:
JP2012107377A
Publication Date:
November 09, 2016
Filing Date:
May 09, 2012
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| JP2009218323A | ||||
| JP2010171405A | ||||
| JP2010212674A |
Attorney, Agent or Firm:
Hosaka Enju