Title:
低濃度NOX計測器に用いるチャンバ
Document Type and Number:
Japanese Patent JP3554464
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To miniaturize a chamber and to improve measurement accuracy by providing a sensor element mounting part and a catalyst accommodation part in a chamber substrate and connecting them with a connection hole. SOLUTION: A catalyst 5 balances the pressure division ratio of NO and NO2 and combusts and eliminates a flammable gas such as CO. Sensor elements 6-1 and 6-2 are constituted of a metal oxide semiconductor whose resistance changes according to the NOx constituent due to the contact of a gas to be measured. A first sensor element mounting part 34, a catalyst accommodation part 35, and a second sensor element mounting part 36 are formed in a chamber substrate 33 with an entrance 31 and an exit 32 of the gas to be measured. The entrance 31 and the sensor element mounting part 34, the sensor element mounting part 34 and the catalyst accommodation part 35, the catalyst accommodation part 35 and the sensor element mounting part 36, and the sensor element mounting part 36 and the exit 32 are connected by a connection hole 37, a connection hole 38, a connection hole 39, and a connection hole 40, respectively, thus reducing the size of the entire chamber.
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Inventors:
Shinji Otsubo
Toshihiro Yoshida
Toshihiro Yoshida
Application Number:
JP11086497A
Publication Date:
August 18, 2004
Filing Date:
April 28, 1997
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
G01N27/12; (IPC1-7): G01N27/12
Domestic Patent References:
| JP6098346A | ||||
| JP8278272A |
Attorney, Agent or Firm:
Kosaku Sugimura
Norita Tomita
Hiroshi Tokunaga
Kazuaki Takami
Umemoto Masao
Juno Aoki
Shiro Fujitani
Norita Tomita
Hiroshi Tokunaga
Kazuaki Takami
Umemoto Masao
Juno Aoki
Shiro Fujitani