Title:
CHAMFER GRINDING METHOD AND CHAMFER GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2022047538
Kind Code:
A
Abstract:
To provide preferable surface roughness even when it is a process of grinding a notch groove, to reduce load of polishing process that is post-process, thereby improving final surface roughness and shape accuracy.SOLUTION: In a chamfer grinding method for grinding an end face of a plate-like material W to be processed with a grinding abrasive wheel 72, the grinding abrasive wheel 72 includes: a groove part 72-4 parallel to an axial direction, as a processing groove 72-1; and slopes 72-2, 72-3 formed in an upper and a lower of the groove part. The chamfer grinding method includes: rotating the grinding abrasive wheel 72 and providing supersonic vibration in an axial direction to the grinding abrasive wheel; and pressing the processing groove 72-1 at the end face of the material W to be processed from a vertical direction so that they abut on each other to grind the object.SELECTED DRAWING: Figure 9
Inventors:
KATAYAMA SHO
INAMURA MASATO
INAMURA MASATO
Application Number:
JP2021180057A
Publication Date:
March 24, 2022
Filing Date:
November 04, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B1/04; B24B9/00; H01L21/304
Domestic Patent References:
| JP2015174180A | 2015-10-05 | |||
| JP2005153129A | 2005-06-16 | |||
| JPH09168947A | 1997-06-30 | |||
| JP2010207984A | 2010-09-24 | |||
| JP2005231022A | 2005-09-02 | |||
| JP2008155287A | 2008-07-10 | |||
| JP2015223669A | 2015-12-14 | |||
| JPH07100753A | 1995-04-18 | |||
| JPS62162451A | 1987-07-18 |
Attorney, Agent or Firm:
Yoshinobu Kanayama
Shohei Sakai
Shohei Sakai
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