CHARACTERISTIC EVALUATION APPARATUS AND METHOD

Title:

CHARACTERISTIC EVALUATION APPARATUS AND METHOD

Document Type and Number:

Japanese Patent JPH0743416

Kind Code:

A

Abstract:

PURPOSE: To achieve a value of activating energy in a short time and moreover, at high accuracy.

CONSTITUTION: Conductors 113 and 114 for measuring voltages and broader end conductors 102 and 103 are connected to both ends of a conductor 101 for testing and each one thereof is connected to bond pads 115, 116, 104 and 105 separately. Moreover, conductors 106 and 107 for generating heat are set near and further parallel with the conductor 101 for testing and each one end part thereof is connected with a conductor 108 for connection of the conductor for generating heat and the other end part thereof is connected to conductors 109 and 110 for generating heat at a broader end part. Other ends of the conductors 109 and 110 for generating heat at the broader end part are connected to bond pads 111 and 112 respectively.

Inventors:

NISHIMURA KOICHI

Application Number:

JP18603093A

Publication Date:

February 14, 1995

Filing Date:

July 28, 1993

Export Citation:

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Assignee:

MATSUSHITA ELECTRONICS CORP

International Classes:

G01R31/30; H01L21/66; G01R31/26; (IPC1-7): G01R31/26; G01R31/30; H01L21/66

Attorney, Agent or Firm:

Akira Kobiji (2 outside)

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