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Title:
CHARGE NEUTRALIZING METHOD DETECTION DEVICE AND CHARGE NEUTRALIZING DETECTION METHOD
Document Type and Number:
Japanese Patent JP2023008812
Kind Code:
A
Abstract:
To provide a charge neutralization technology, particularly a charge neutralization detection device and a detection method thereof.SOLUTION: A charge neutralization detection device includes an electron optical system and a charge neutralization component disposed in a vacuum chamber, and the electron optical system outputs a charged particle beam to an observation position in the vacuum chamber to provide a focused vacuum ultraviolet ray that reaches the observation position so that the charge neutralization component neutralizes the accumulated charge.SELECTED DRAWING: Figure 1

Inventors:
CHEN HSU-WEI
CHENG HSIN-CHI
HUANG ZU WEI
HSIEH TING-YU
Application Number:
JP2022071951A
Publication Date:
January 19, 2023
Filing Date:
April 25, 2022
Export Citation:
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Assignee:
TAIWAN ELECTRON MICROSCOPE INSTR CORP
International Classes:
H01J37/20; H05F3/06
Domestic Patent References:
JP2006344444A2006-12-21
JP2007113992A2007-05-10
JPH01194256A1989-08-04
JP2000036273A2000-02-02
JP2005174591A2005-06-30
JP2009004114A2009-01-08
JP2006351303A2006-12-28
JP2002231172A2002-08-16
JP2007026987A2007-02-01
Attorney, Agent or Firm:
Patent Attorney Corporation RYUKA International Patent Office



 
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