To provide a charged beam device which is capable of displaying an observation image with both low and high magnifications and with a short update time, a high degree of freedom, and stability, and capable of readily finding a desired observation position to be observed with a high magnification, with a good operability.

A scanning electron microscope has an input device 30, an image display device 40, and a controller 100. The scanning electron microscope uses an electron beam to 2D-scan a scan area on a sample which has been specified by the input device 30, detects charged particles from the scan area, and displays an observation image on the image display device 40 in synchronization with a scan signal of the electron beam. In the scanning electron microscope, the controller 100 gains a first observation image of a first scan area of a sample with a given magnification, and displays the first observation image in a first window of the image display device, the input device 30 is used to specify a position and an area in the first observation image thereby to set a second scan area, and the controller gains a second observation image of the second scan area with a magnification larger than the first magnification, and displays, on the image display device 40, a second window where the second observation image is drawn in combination with the display of the first window.