Title:
CHARGED BEAM DRAWING METHOD
Document Type and Number:
Japanese Patent JP3454974
Kind Code:
B2
Abstract:
PURPOSE: To provide a charged beam drawing method for creating drawing data with improved data compression by effectively utilizing the repetition of a pattern in design data created by CAD and at the same time for reducing the number of blocks and hence improving drawing throughput.
CONSTITUTION: The region area of blocks (bottom blocks) 4a, 4b, 4c, and 4d with repetition in a drawing design data is compared with the region area of a sub field. When the assembly area of the blocks 4a, 4b, 4c, and 4d is equal to or less than the region area of the sub field, figure information in the blocks 4a, 4b, 4c, and 4d is expanded into the blocks.
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Inventors:
Osamu Ikenaga
Application Number:
JP16032395A
Publication Date:
October 06, 2003
Filing Date:
June 27, 1995
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP4162611A | ||||
| JP4211112A | ||||
| JP3150836A |
Attorney, Agent or Firm:
Hideaki Togawa