PURPOSE: To speed up ion change-over by simultaneously ionizng more than two kinds of gas inside an ion generation means while taking out only those ions having prescribed energy followed by selecting according to the kinds with time sharig and a cycle in order to accelerate them.
CONSTITUTION: More than two kinds of gas in accordance with the purposed ions are introduced from a bomb 2 into an ion source 1 for being ionized and drawn out with a drawing-out electrode 5 for being deflected by a parallel plate electrode 6. Then, those ions having prescribed energy are selected through a slit 8 followed by controlling an energy changing means consisting of an energy regulator 9, an analysis magnet 10 and a slit 13 basing on the output of an oscillator 16 for selecting the energy according to its kinds with time sharing and a cycle followed by accelerating with an accelerator 14 for performing ion driving into a target 15. Accordingly, it becomes possible to quickly change-over more than two kinds of ions while to obtain their energy in a variable state.
NISHIMURA EIICHI
SUZUKI KAZUMICHI
