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Title:
CHARGED PARTICLE BEAM ADJUSTMENT METHOD, AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2010016007
Kind Code:
A
Abstract:

To provide a beam condition adjustment method and a device, suitable for adjusting beam conditions under a condition different from a vertical beam such as at the time of inclined beam in a device for obtaining an image by irradiating charged particle beam onto a test piece.

In this method and this device, when the charged particle beam is inclined and irradiated, regarding an astigmatism corrector in which astigmatism correction intensities in a plurality of directions can be adjusted, evaluation values are required for respective combinations of adjustment intensities in a plurality of directions, and based on the combinations of the adjustment intensity having the high evaluation value, the method and device of deciding the combinations of the adjustment intensity of the astigmatism corrector is provided.


Inventors:
MOROKUMA HIDETOSHI
ARAI NORIAKI
DOI TAKASHI
SASAJIMA JIDAI
KIMURA YOSHIHIRO
Application Number:
JP2009242938A
Publication Date:
January 21, 2010
Filing Date:
October 22, 2009
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/153
Domestic Patent References:
JP2004127930A2004-04-22
JP2001110345A2001-04-20
JP2002134048A2002-05-10
JPH08148108A1996-06-07
Attorney, Agent or Firm:
Manabu Inoue



 
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