Title:
荷電粒子線の調整方法、及び荷電粒子線装置
Document Type and Number:
Japanese Patent JP4231891
Kind Code:
B2
Abstract:
To provide a charged particle beam device capable of both reducing damages to a measured object and improving accuracy for measuring.
For achieving the above purposes, a focus of charged particle beams, brightness of images, and/or contrast of the images are adjusted based on a first image formed by basis of scanning of the charged particle beams on a first pattern formed on a sample, and then, scanning of the charged particle beams on a second pattern different from the first pattern is carried out by using the adjusted charged particle beams and/or the adjusted conditions forming adjusted images.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
Hiroki Kawada
Ryo Nakagaki
Ryo Nakagaki
Application Number:
JP2007317834A
Publication Date:
March 04, 2009
Filing Date:
December 10, 2007
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/21
Domestic Patent References:
| JP4269613A |
Foreign References:
| WO2003021186A1 |
Attorney, Agent or Firm:
Manabu Inoue