Title:
CHARGED PARTICLE BEAM APPARATUS AND COORDINATE CORRECTION METHOD
Document Type and Number:
Japanese Patent JP2015203628
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus capable of improving a defect detection rate in a sample in which defects having various sizes are mixed together, and a coordinate correction method.SOLUTION: The charged particle beam apparatus capable of acquiring position images of defects on a sample using information on the defects on the sample acquired by an inspection device comprises a stage, a charged particle beam optical system, an image operation unit, an optical microscope and a controller. The controller classifies the defects into a plurality of groups using information on defect sizes included in the information on the defects and determines execution order of fine alignment toward the outer periphery from the center of the sample sequentially from a group having smaller defect size out of the plurality of groups.
Inventors:
NISHIGATA KENICHI
ABE KATSUAKI
ABE KATSUAKI
Application Number:
JP2014083261A
Publication Date:
November 16, 2015
Filing Date:
April 15, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
G01N23/04; H01L21/66
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe