To provide a charged particle beam apparatus, having the function of suppressing vibration of a mirror body and a vibration control method of the charged particle beam device, which has high accuracy vibration-damping performance.

The charged particle beam device comprises a first detection sensor for detecting the vibrations of a surface plate and a sample chamber, a second detection sensor for detecting the vibration of the mirror body, an actuator which applies inhibitory vibration to the surface plate, and an operation control part which calculates the drive amount of the inhibitory vibration. The operation control part obtains the drive amount of control vibration for suppressing the vibration of the mirror body and the vibration of the surface plate and the sample chamber by a state feedback control rule, based on the detected signal of the first detection sensor and the second detection sensor.