CHARGED PARTICLE BEAM APPARATUS

Japanese Patent JP2015088337

A

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus which allows an in-situ observation to be performed readily in a gas atmosphere.SOLUTION: A charged particle beam apparatus 100 for observing a sample S put in a gas atmosphere comprises: a sample chamber 2; a gas supply part 6 for supplying gas into the sample chamber 2; an evacuation part 7 for evacuating the sample chamber 2; a gas-environment-adjustment part 4 which has a gas-inflow-adjustment valve 40 for adjusting the flow rate of the gas to be supplied into the sample chamber 2, and a first vacuum gauge CG1 for measuring the pressure of the gas supplied into the sample chamber 2; and a gas control part for controlling the gas-environment adjustment part 4. The gas control part sets a target pressure value of the gas to be supplied into the sample chamber 2 based on a relational expression showing the relation between a result of measurement by the first vacuum gauge CG1 and a pressure in the sample chamber 2, and a correction coefficient for correcting the result of measurement by the first vacuum gauge CG1 according to the kind of the gas supplied into the sample chamber 2, and controls the gas-inflow-adjustment valve 40 so that the result of measurement by the first vacuum gauge CG1 coincides with the target pressure value.

HIROKI YASUSHI
OSAKI MITSUAKI

JP2013225916A

May 07, 2015

October 30, 2013

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JEOL LTD

H01J37/18; H01J37/16; H01J37/26; H01J37/28

JPH10275583A	1998-10-13
JPS5423464A	1979-02-22
JP2013020747A	2013-01-31
JP2011210492A	2011-10-20
JP2006100118A	2006-04-13
JP2011034695A	2011-02-17

WO2013099435A1	2013-07-04
US20120305769A1	2012-12-06

Yukio Fuse
Mitsue Obuchi

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