To provide a charged particle beam control device and a charged particle beam optical device using the same, and a charged particle beam defect checking device which can accurately and easily position an electric field and a magnetic field.

A pair of electrodes 11, 12 facing each other are formed by covering a part of ceramics by metal, and a Wien's filter A is constructed by arranging a pair of magnetic poles 13, 14 perpendicular to the pair of electrodes 11, 12. Here, side surfaces 11e, 11f and side surfaces 12e, 12f are formed to the part of the electrodes 11, 12 which are not covered by metal, and a first positioning surfaces 13e, 13f are formed to the magnetic poles 13, 14, and relative position of the electrodes 11, 12 and the magnetic poles 13,14 are fixed by making above surfaces contact with each other, thus, the electrodes 11, 12 and the magnetic poles 13, 14 are positioned.