Title:
CHARGED PARTICLE BEAM DEVICE, AND IMAGE GENERATING METHOD
Document Type and Number:
Japanese Patent JP2015146283
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of generating an SEM image that reflects a sample shape at a desired depth by one image acquisition, in observation of a sample having a structure in a depth direction, while avoiding increase in size of the device.SOLUTION: A charged particle beam device comprises: an irradiation optical system 205 for irradiating and scanning a sample with a charged particle beam emitted from a charged particle source 202; a detection optical system having a detector 209 for detecting charged particles 207 generated from the sample by the irradiation of the charged particle beam, and converting them into an electric signal at a predetermined sampling period; and an image processing part 222 for generating an image on the basis of the electric signal from the detector 209. The image processing part 222 detects a peak H (T5) of a peak value from the electric signal of each sampling time for each pixel, and generates an image on the basis of the peak H (T5) of the detected peak value.
Inventors:
HATANO MICHIO
ABE YUSUKE
WANG JIKANG
ABE YUSUKE
WANG JIKANG
Application Number:
JP2014019133A
Publication Date:
August 13, 2015
Filing Date:
February 04, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/22; H01J37/244; H01J37/28
Domestic Patent References:
| JP2013033671A | 2013-02-14 | |||
| JP2006189375A | 2006-07-20 | |||
| JP2013033671A | 2013-02-14 | |||
| JP2006189375A | 2006-07-20 |
Foreign References:
| US20130245989A1 | 2013-09-19 | |||
| US20130245989A1 | 2013-09-19 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation