To provide a charged particle beam device and a sample holder for such a device which allow the atomic-level status observation of a sample at a gas atmosphere which involves difficulty in a conventional method wherein an effect of sample drift or vibration arises depending on the gas flow direction and atomic-level observation is impossible when a variation in reaction is observed by heating a sample for example by the use of a small amount of gas as a method of observing the sample at the gas atmosphere using the charged particle beam device, and large-scaled equipment with a vacuum apparatus is required in transporting the sample without exposure to the air and the replacement of samples.
In the charged particle beam device which has a mechanism for locally injecting gas to the sample to be observed and the sample holder for such a device, there is formed a micro-gas blowout part in proximity to the sample to be observed and in opposition to the sample to solve the problem.
UENO TAKEO
HASHIMOTO TAKAHITO
| JP2005251737A | 2005-09-15 | |||
| JP2003308801A | 2003-10-31 | |||
| JPS5540953U | 1980-03-15 | |||
| JP2005190864A | 2005-07-14 | |||
| JP2004515049A | 2004-05-20 | |||
| JPH0750148A | 1995-02-21 |