To provide a charged particle beam device capable of suppressing occurrence of discharges between a charged particle source and a casing and between an extraction electrode and the casing.
The charged particle beam device comprises a charged particle source 3 for emitting charged particles 15, charged particle source terminals 14a and 14b disposed from the outside of the casing 1 to the inside to feed power from the outside of the casing 1 to the charged particle source 3, an extraction electrode 4 for extracting charged particles 15 from the charged particle source 3, an extraction electrode terminal 14c disposed from the outside of the casing 1 to the inside to feed power from the outside of the casing 1 to the extraction electrode 4, a terminal insulator 12 for insulating charged particle source terminals 14a and 14b and the extraction electrode terminal 14c from the casing 1, and an extraction electrode insulator 13 for supporting the extraction electrode 4 and insulating the extraction electrode 4 from the casing 1. At least one of the terminal insulator 12 and the extraction electrode insulator 13 has a resistivity of 106 m to 1010 m.
TAKEUCHI RYOZO
HATANAKA AYUMI
| JP2004022235A | 2004-01-22 | |||
| JP2002164010A | 2002-06-07 | |||
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| JPH0745315A | 1995-02-14 | |||
| JPH0867553A | 1996-03-12 | |||
| JP2002151480A | 2002-05-24 | |||
| JPS62108770A | 1987-05-20 |
Etsuo Tada
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