Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2013105603
Kind Code:
A
Abstract:
To automatically correct rotation of an image obtained by a charged particle beam device without depending on a skill of an operator.
A rotation amount of a sample is detected by taking notice of a feature of a pattern shape and a feature on a pattern array to be measured, a rotation angle of an obtained image displayed on a work screen is automatically corrected by image processing on the basis of the detected amount. Alternatively, a rotation amount of a sample is detected by taking notice of a feature of a pattern shape and a feature on a pattern array to be measured, a rotation angle of a sample rotation mechanism is automatically corrected based on the detected amount, and a pattern to be measured is subsequently obtained again.
Inventors:
NUMATA YUKI
KOIKE HIROTO
KOIKE HIROTO
Application Number:
JP2011248012A
Publication Date:
May 30, 2013
Filing Date:
November 11, 2011
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/22; H01J37/20; H01J37/28
Domestic Patent References:
| JPH01112649A | 1989-05-01 | |||
| JPS63284405A | 1988-11-21 | |||
| JP2003141782A | 2003-05-16 | |||
| JP2008139085A | 2008-06-19 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe
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