Title:
荷電粒子線装置
Document Type and Number:
Japanese Patent JP4298938
Kind Code:
B2
Inventors:
Satoshi Yamaguchi
Yasuhiko Ozawa
High Atsushi Ne
Mitsugi Sato
Yasuhiko Ozawa
High Atsushi Ne
Mitsugi Sato
Application Number:
JP2001208674A
Publication Date:
July 22, 2009
Filing Date:
July 10, 2001
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/04; H01L21/66; H01J37/147; H01J37/153; H01L21/027
Domestic Patent References:
| JP10092354A | ||||
| JP2000106116A | ||||
| JP2234336A | ||||
| JP56032655A | ||||
| JP64033835A | ||||
| JP2001147113A | ||||
| JP2001110345A |
Attorney, Agent or Firm:
Yusuke Hiraki