Title:
荷電粒子線装置
Document Type and Number:
Japanese Patent JP5677236
Kind Code:
B2
Abstract:
This charged particle beam device is characterized by controlling a deflector in a manner so as to correct the amount of scanning deflection of a charged particle beam between: a first detection condition for detecting a secondary charged particle (112) signal; and a second detection condition for detecting a reflected charged particle (111) signal. As a result, it is possible to correct length measurement error and scaling fluctuation arising when altering the type of charged particle to detect. Thus, in the observation, measurement, and the like of a low-step sample or a charged sample, even when forming an image that is on the basis of the reflected charged particle signal, it is possible to obtain an accurate image regardless of length measurement error and scaling fluctuation.
Inventors:
王 志剛
岡井 信裕
佐藤 秀寿
深谷 律雄
岡井 信裕
佐藤 秀寿
深谷 律雄
Application Number:
JP2011180100A
Publication Date:
February 25, 2015
Filing Date:
August 22, 2011
Export Citation:
Assignee:
株式会社日立ハイテクノロジーズ
International Classes:
H01J37/147; G01B15/00; G01B15/04; H01J37/22; H01J37/244; H01J37/28
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki