Title:
荷電粒子線装置
Document Type and Number:
Japanese Patent JP5852474
Kind Code:
B2
Abstract:
Provided is a charged particle beam device with high sensitivity, capable of detecting charged particles emitted from a sample at high resolution. An absorption current detector arranged to contact with the sample makes an absorption current generated in the sample by an irradiated charged particle beam flow through the detector, thereby to detect the current. The charged particle beam scans the sample and the charged particle beam device acquires an absorption current image. In case the absorption current detector is arranged separated from the sample, the absorption current detector detects the incident charged particle beam as a signal current dependent on an angle θ formed in a direction from the irradiation position on the sample toward the absorption current detector relative to at least one of the normal line direction of the front surface of the sample and the incident direction of the charged particle beam.
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Inventors:
Honored Nanri
Satoshi Tomimatsu
Sekihara
Satoshi Tomimatsu
Sekihara
Application Number:
JP2012045128A
Publication Date:
February 03, 2016
Filing Date:
March 01, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/244; H01J37/20; H01J37/24
Domestic Patent References:
| JP9326425A | ||||
| JP55143766A | ||||
| JP61088442A | ||||
| JP2010199002A | ||||
| JP1037687U | ||||
| JP44030791Y1 |
Attorney, Agent or Firm:
Isono Dozo
Etsuo Tada
Etsuo Tada
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