Title:
Charged particle beam device
Document Type and Number:
Japanese Patent JP5998004
Kind Code:
B2
Abstract:
The present invention provides a charged-particle radiation apparatus with a defect observation device for observing defects on a sample, the apparatus including a control unit and a display unit. The control unit is configured to execute a drift correction process on one or more images acquired with the defect observation device under a plurality of correction conditions, and display the plurality of correction conditions and a plurality of corrected images obtained through execution of the drift correction process in association with each other, as a first screen on the display unit.
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Inventors:
Dai Hirai
Ryo Nakagaki
Kenji Ohara
Ryo Nakagaki
Kenji Ohara
Application Number:
JP2012229221A
Publication Date:
September 28, 2016
Filing Date:
October 16, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/66; H01J37/22; H01J37/28
Domestic Patent References:
| JP2007266017A |
Foreign References:
| WO2003044821A1 | ||||
| WO2011089911A1 |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe