Title:
荷電粒子線装置
Document Type and Number:
Japanese Patent JP7105271
Kind Code:
B2
Abstract:
There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope (100) that embodies the charged particle beam system includes a discriminator (124) for determining the type of each cartridge based on the range or distance measured by a laser range finder (92). Plural cartridges (2) are received in a magazine (4). The laser range finder (92) measures the range to a selected one of the plural cartridges (2) which is placed in a measurement position. A first cartridge (2a) of a first type included in the plural cartridges (2) has a first measurement surface (208) at a first distance to the laser range finder (92) when placed in the measurement position. A second cartridge (2b) of a second type has a second measurement surface (218) at a second range to the laser range finder (92) when placed in the measurement position.
Inventors:
Chiyo out
Naoki Fujimoto
Tomoyuki Naganuma
Naoki Fujimoto
Tomoyuki Naganuma
Application Number:
JP2020069189A
Publication Date:
July 22, 2022
Filing Date:
April 07, 2020
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/20
Domestic Patent References:
| JP2017500722A | ||||
| JP2008269219A | ||||
| JP2001250099A | ||||
| JP11030573A |
Attorney, Agent or Firm:
Fuse Yukio
Michie Obuchi
Michie Obuchi
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