To provide a drawing device that acquires a mirror curving deformation amount inside the device.
The drawing device 100 includes: an XY stage 105 where an X-directional reflecting mirror 30 and reflecting mirror 32 are disposed and a sample 101 is placed; laser interferometers 10 and 12 which measure the position of the XY stage 105 in an X direction by irradiating the XY stage with a laser beam from the same direction; laser interferometers 14 and 16 which measure the position of the XY stage 105 in a Y direction by irradiating the XY stage with a laser beam from the same direction; a deformation amount arithmetic unit 140 which computes amounts of curving deformation of the reflecting mirrors 30 and 32 using a difference value between measured values obtained by the laser interferometers 10 and 12 and that between measured values obtained by the laser interferometers 14 and 16; and a drawing unit 150 which draws a pattern at a position corrected on the basis of the amount of curving deformation. The amounts of curving deformation of the mirrors can be acquired in the device.
Tetsuma Ikegami
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