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Title:
CHARGED-PARTICLE-BEAM DRAWING DEVICE, AND MIRROR CURVING DEFORMATION AMOUNT ACQUIRING METHOD FOR STAGE
Document Type and Number:
Japanese Patent JP2009088371
Kind Code:
A
Abstract:

To provide a drawing device that acquires a mirror curving deformation amount inside the device.

The drawing device 100 includes: an XY stage 105 where an X-directional reflecting mirror 30 and reflecting mirror 32 are disposed and a sample 101 is placed; laser interferometers 10 and 12 which measure the position of the XY stage 105 in an X direction by irradiating the XY stage with a laser beam from the same direction; laser interferometers 14 and 16 which measure the position of the XY stage 105 in a Y direction by irradiating the XY stage with a laser beam from the same direction; a deformation amount arithmetic unit 140 which computes amounts of curving deformation of the reflecting mirrors 30 and 32 using a difference value between measured values obtained by the laser interferometers 10 and 12 and that between measured values obtained by the laser interferometers 14 and 16; and a drawing unit 150 which draws a pattern at a position corrected on the basis of the amount of curving deformation. The amounts of curving deformation of the mirrors can be acquired in the device.


Inventors:
TAMAMUSHI SHUICHI
Application Number:
JP2007258462A
Publication Date:
April 23, 2009
Filing Date:
October 02, 2007
Export Citation:
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Assignee:
NUFLARE TECHNOLOGY INC
International Classes:
H01L21/027; G03F7/20; H01J37/305
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami