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Title:
荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法
Document Type and Number:
Japanese Patent JP5497584
Kind Code:
B2
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Inventors:
Shusuke Yoshitake
Application Number:
JP2010195052A
Publication Date:
May 21, 2014
Filing Date:
August 31, 2010
Export Citation:
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Assignee:
New Flare Technology Co., Ltd.
International Classes:
H01L21/027; G03F1/24; G03F1/78; G03F7/20
Domestic Patent References:
JP2001033941A
JP2004170948A
JP2007171640A
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama



 
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