PURPOSE: To realize a charged particle beam drawing method capable of performing correctly a correction of the moving errors of a stage even if a charged particle beam drawing is a direct drawing.

CONSTITUTION: The movement of a stage 5 is monitored by a stage position measuring unit 15 and the measured movements of the stage 5 are sent to a vector arithmetic unit 16. Differences (x) and (y) between the measured movements and the set movement of the stage 5 are found in the unit 16 and the values of the differences are sent to a scanner unit 6. The unit 9 makes a deflection signal on the basis of data on a pattern, but the (x) and (y), which are moving errors, are added to this deflection signal. The unit 16 finds a correction vector C (Δx and Δy) on the basis of the angle G of rotation of a material 3 and the moving errors (x) and (y), the (Δx) is fed to a shift unit 10 and the (Δy) is fed to a shift unit 11. In the shift units 10 and 11, a shift of the (Δx) and the (Δy) is executed to the deflection signal from the unit 9.