CHARGED PARTICLE BEAM EXPOSING DEVICE

Title:

CHARGED PARTICLE BEAM EXPOSING DEVICE

Document Type and Number:

Japanese Patent JPH0574404

Kind Code:

A

Abstract:

PURPOSE: To enhance the reliability of a charged particle beam exposing device by detecting abnormality of the device at real time to realize an accurate man agement.

CONSTITUTION: This device is provided with an electron beam position abnormality detecting part 7, an electron beam abnormality detecting part 11, a drawing control part 1 for transmitting and receiving signals with the parts 7 and 11, and a peripheral circuit, so as to enhance reliability of the device. Effects are provided such as yield improvement of drawing, decrease of downtime, and further saving of labor for inspection of a drawn wafer.

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Inventors:

OKUMURA MASAHIDE
MATSUOKA GENYA
YODA HARUO
SAITO NORIO

Application Number:

JP23004691A

Publication Date:

March 26, 1993

Filing Date:

September 10, 1991

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

G03F7/20; G21K5/04; H01J37/04; H01J37/305; H01L21/027; (IPC1-7): G03F7/20; G21K5/04; H01J37/04; H01J37/305; H01L21/027

Attorney, Agent or Firm:

Ogawa Katsuo

Next Patent: ARRANGEMENT OF BEARING FOR WHEEL BOSS