Title:
荷電粒子線露光装置、荷電粒子線露光方法およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4756776
Kind Code:
B2
Abstract:
A multi-charged-particle beam drawing apparatus and method that can correct a change in positional relationship, caused by the Coulomb effect, among charged particle beams are provided. The focal lengths of two electron lenses ( 21, 22 ) that form a condenser lens ( 2 ) are adjusted individually to change a relative positional relationship between the front focal position of the condenser lens ( 2 ) and an electron source (ES). Electron beams becoming incident on an aperture array (AA) can diverge, or be focused or collimated. Therefore, positions where intermediate images (img 1 -img 3 ) are to be formed can be changed, and the change in positional relationship, caused by the Coulomb effect, among the charged particle beams can be corrected.
Inventors:
Masato Muraki
Application Number:
JP2001157930A
Publication Date:
August 24, 2011
Filing Date:
May 25, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/027; H01J37/147; H01J37/153; H01J37/302; H01J37/305; H01J37/317
Domestic Patent References:
| JP11195589A | ||||
| JP9007538A | ||||
| JP10208996A | ||||
| JP10335223A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura