Title:
CHARGED PARTICLE BEAM SYSTEM, DETERMINATION METHOD OF RANGE TO AUTOMATICALLY SEARCH FOR FOCAL POSITION IN CHARGED PARTICLE BEAM DEVICE, AND NON-TEMPORARY STORAGE MEDIUM RECORDING PROGRAM FOR CAUSING COMPUTER SYSTEM TO DETERMINE RANGE FOR AUTOMATICALLY SEARCHING FOR FOCAL POSITION IN CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2021086793
Kind Code:
A
Abstract:
To provide a technique for reducing the man-hours required for setting an automatic in-focus search function of an electron beam when a defect is reviewed using an electron microscope and facilitating the observation of a sample.SOLUTION: In a charged particle beam system according to the present disclosure, a technology is provided that automatically sets an appropriate focus position search width in consideration of convergence accuracy and operation time from the width of the focus measure distribution with respect to a focus position acquired in advance under the same conditions and the difference in focus position before and after the automatic focus position search.SELECTED DRAWING: Figure 11
Inventors:
MATSUMOTO KOSUKE
NOBUHARA TAKESHI
KIZUKI HIROHIKO
OBARA KENJI
NOBUHARA TAKESHI
KIZUKI HIROHIKO
OBARA KENJI
Application Number:
JP2019216668A
Publication Date:
June 03, 2021
Filing Date:
November 29, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/21; H01J37/22; H01J37/28; H01L21/66
Attorney, Agent or Firm:
Hiraki International Patent Office