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Patent Searching and Data


Title:
CHARGED PARTICLES REMOVING ELECTRODE AND REMOVING METHOD THEREFOR
Document Type and Number:
Japanese Patent JPH0716432
Kind Code:
A
Abstract:

PURPOSE: To efficiently remove the charged particles in an atomic beam with small input power by constituting a removing electrode of ≥2 stages and impressing higher negative voltage to a succeeding stage removing electrode than that of a preceding stage removing electrode.

CONSTITUTION: More than two stages electrodes 1 and 2 are composed of the removing electrode which moves charged particles from the atomic beam containing the charged particles. And the succeeding stage removing electrode 2 is impressed higher negative voltage than that of the preceding stage removing electrode 1. The charged particles 4 are pulled-in to the removing electrodes 1 and 2 impressed negative voltage, and plasma is diminished in the removing electrodes 1 and 2. On the other hand, the atomic beam 5 rises without pulled-in to the removing electrode, so that the separation efficiency of a atomic method laser isotope separation is improved.


Inventors:
SHIBATA TAKEYOSHI
OBA HIRONORI
Application Number:
JP16258693A
Publication Date:
January 20, 1995
Filing Date:
June 30, 1993
Export Citation:
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Assignee:
JAPAN ATOMIC ENERGY RES INST
International Classes:
B01D59/34; B03C3/38; (IPC1-7): B01D59/34; B03C3/38
Attorney, Agent or Firm:
Kyozo Yuasa (5 people outside)