Title:
CHECK VALVE DEVICE FOR MICRO PUMP, AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3946178
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a check valve device for a micro pump having good assembling property and thinned while being able to apply energizing force.
SOLUTION: Valve members 2, 4 formed with valve mechanisms 10A, 10B are disposed clamped between upstream members 3, 5 formed with small diameter holes 3a, 5b allowing a fluid to pass through, and between downstream members 5, 1 formed with large diameter holes 5a, 1b allowing the fluid to pass through. The valve mechanisms 10A, 10B of the valve members 2, 4 are composed of passing holes 13A, 13B formed corresponding to the positions and sizes of the large diameter holes 5a, 1b of the downstream members 5, 1; abutting parts 11A, 11B formed to face corresponding to the positions and sizes of the small diameter holes 3a, 5b of the upstream members 3, 5 inside the holes 13A, 13B to close the small diameter holes 3a, 5b of the upstream members 3, 5; and support parts 12A, 12B formed to straddle the passing holes 13A, 13B to support the abutting parts 11A, 11B. The valve members 2, 4 used in this case are larger in the coefficient of linear expansion than the upstream members 3, 5 and downstream members 5, 1.
Inventors:
Toshihiro Yamanishi
Application Number:
JP2003313332A
Publication Date:
July 18, 2007
Filing Date:
September 05, 2003
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B81B3/00; F04B43/02; B81C3/00; F04B19/00; F04B43/04; H01L41/09; H01L41/22; H01L41/25; (IPC1-7): F04B43/02; B81B3/00; B81C3/00; F04B43/04; H01L41/09; H01L41/22
Domestic Patent References:
| JP2000154783A | ||||
| JP4290679A | ||||
| JP2003133613A |
Attorney, Agent or Firm:
Takao Itagaki
Yoshihiro Morimoto
Yoshihiro Morimoto