Title:
化学洗浄廃液の処理方法
Document Type and Number:
Japanese Patent JP5050447
Kind Code:
B2
Inventors:
Hiroo Yoshikawa
Masahiko Kazama
Masahiko Kazama
Application Number:
JP2006232682A
Publication Date:
October 17, 2012
Filing Date:
August 29, 2006
Export Citation:
Assignee:
Kurita Engineering Co., Ltd.
International Classes:
C02F1/44; B01D61/02; B01D61/58; C02F1/04; B01D53/86; G21F9/06
Domestic Patent References:
| JP200433910A | ||||
| JP2003245616A | ||||
| JP2001314872A |
Attorney, Agent or Firm:
Shigeru Yanagihara