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Patent Searching and Data


Title:
CHEMICAL ETCHING APPARATUS COMBINED WITH LASER
Document Type and Number:
Japanese Patent JPS6137981
Kind Code:
A
Abstract:

PURPOSE: To reduce the reflection of laser light and to improve the convergence by placing a converging lens for converging laser light on a body to be worked in an etching soln. at a prescribed position without leaving a space between the lens and the etching soln.

CONSTITUTION: Laser light L is converged on the surface of a body 2 to be worked in an etching soln. 3 through a converging lens 1. The underside of the lens 1 through which the laser light L passes is in contact with the etching soln. 3, and no space is left between the lens 1 and the soln. 3. The reflection and scattering of laser light L from the surface of the soln. 3 are reduced, the convergence is improved, and the absorption of energy is reduced.


Inventors:
MORITA NOBORU
Application Number:
JP15861184A
Publication Date:
February 22, 1986
Filing Date:
July 31, 1984
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
C23F1/08; C23F1/02; (IPC1-7): C23F1/08
Attorney, Agent or Firm:
Noriyuki Noriyuki