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Title:
CHEMICAL FILTER
Document Type and Number:
Japanese Patent JP2015098020
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a chemical filter for silanol compound removal which can remove a silanol compound in the air efficiently.SOLUTION: A chemical filter for silanol compound removal is characterized by using, as an absorbent, an inorganic silica porous material which has 7 or less of the pH of a mixture (content: 5 wt%) when mixed with pure water.

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Inventors:
SHIGETA MAKOTO
OSHIO MINORU
Application Number:
JP2014209035A
Publication Date:
May 28, 2015
Filing Date:
October 10, 2014
Export Citation:
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Assignee:
NITTA KK
International Classes:
B01D53/04; B01J20/02; B01J20/10; B01J20/12; B01J20/14; B01J20/16; B01J20/18; B01J20/28; H01L21/027
Attorney, Agent or Firm:
Yukihisa Goto



 
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