Title:
CHEMICAL LIQUID REFINING DEVICE AND REFINING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2020192527
Kind Code:
A
Abstract:
PURPOSE: To provide a chemical liquid refining device and a refining method using the device.SOLUTION: A chemical liquid refining device includes a tank body, a return pipe, a liquid feed pump, a filter device, and a pipeline. The tank body has a liquid flow port and a circulation port which communicate with a storage space in the tank body. One end of the return pipe is connected to the circulation port and the other end extends into the storage space. The liquid feed pump and the filter device are disposed at the outer side of the tank body between the liquid flow port and the circulation port. The pipeline connects the liquid feed pump and the filter device with the liquid flow port and the circulation port.SELECTED DRAWING: Figure 1
Inventors:
TANAKA KENICHI
FAN CHENG-CHIEH
HUANG SHEN-PING
FAN CHENG-CHIEH
HUANG SHEN-PING
Application Number:
JP2020091973A
Publication Date:
December 03, 2020
Filing Date:
May 27, 2020
Export Citation:
Assignee:
FUJIFILM ELECTRONIC MAT TAIWAN CO LTD
International Classes:
B01D36/02; B01D39/16; B65D88/12; B65D90/04
Domestic Patent References:
| JP2017013900A | 2017-01-19 | |||
| JP2016073922A | 2016-05-12 | |||
| JP2002062667A | 2002-02-28 | |||
| JP2001205019A | 2001-07-31 | |||
| JP2002035517A | 2002-02-05 |
Foreign References:
| WO2018043697A1 | 2018-03-08 | |||
| WO2018051716A1 | 2018-03-22 | |||
| US4390286A | 1983-06-28 | |||
| WO2018180735A1 | 2018-10-04 | |||
| WO2018142888A1 | 2018-08-09 | |||
| WO2017188209A1 | 2017-11-02 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Yuko Hara
Kazushi Ohbuchi
Masakazu Ito
Yuko Hara
Kazushi Ohbuchi