Title:
薬液定量注入装置および方法
Document Type and Number:
Japanese Patent JP4135780
Kind Code:
B2
Abstract:
An apparatus for injecting constant quantitative chemicals which is capable of injecting a chemical solution into ultra pure water without generating particulate contamination, and furthermore, the injection interval of the chemical solution to the cleaning nozzle is controlled in units of seconds within a range of a few seconds to 10 or more seconds, and the switching of the type of chemical solution and the changeover to ultra pure water cleaning can be conducted in a short period of time of approximately 1 second. The apparatus includes a chemical solution injection system having a chemical solution retaining part for retaining the chemical solution, a control system for pressurization and depressurization for controlling the pressure of the chemical solution in the chemical solution retaining part at regular intervals, an injection control system which operates in concert with the control of the pressure of the chemical solution, and is structured so as to conduct the intermittent injection and instantaneous mixing function of the chemical solution from the chemical solution injection system to the ultra pure water flow path, and the injection stoppage function, and a chemical solution replenishment system which is structured so as to operate in concert with the control of the chemical solution and to be capable of replenishing the chemical solution in the chemical solution retaining part from a chemical solution source.
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Inventors:
Masahiro Miki
Yuhisa Nitta
Tadahiro Ohmi
Shinichi Ikeda
Naofumi Yasumoto
Yuhisa Nitta
Tadahiro Ohmi
Shinichi Ikeda
Naofumi Yasumoto
Application Number:
JP23472197A
Publication Date:
August 20, 2008
Filing Date:
August 29, 1997
Export Citation:
Assignee:
UCT Co., Ltd.
Fujikin Co., Ltd.
Fujikin Co., Ltd.
International Classes:
B01J4/02; B01F3/08; C02F1/68; F04B13/00; F04B53/14; H01L21/00; H01L21/304
Domestic Patent References:
| JP3072626A | ||||
| JP10144647A | ||||
| JP11000627A |
Foreign References:
| WO1998001896A1 |
Attorney, Agent or Firm:
Hisao Fukumori