Title:
薬液供給装置
Document Type and Number:
Japanese Patent JP4547368
Kind Code:
B2
Abstract:
A chemical liquid supplying apparatus can discharge chemical liquid with high accuracy and monitor a leakage of an incompressible medium from a region between a piston and a cylinder. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating in a cylinder hole of the cylinder. A bellows cover is provided between the piston and the cylinder, and forms a seal chamber contiguous to a sliding face of the piston. A seal-chamber pressure sensor is attached to the cylinder so as to detect the pressure of the incompressible medium for sealing enclosed in the seal chamber, and a deterioration degree of a seal member is determined by detecting the pressure in the seal chamber.
Inventors:
Takeshi Yajima
Application Number:
JP2006312621A
Publication Date:
September 22, 2010
Filing Date:
November 20, 2006
Export Citation:
Assignee:
Koganei Co., Ltd.
International Classes:
F04B43/10
Domestic Patent References:
| JP2006266250A | ||||
| JP3149371A | ||||
| JP41006418B1 | ||||
| JP2002242842A |
Attorney, Agent or Firm:
Yamato Tsutsui
Yoshitaka Kozuka
Akiko Tsutsui
Yoshitaka Kozuka
Akiko Tsutsui