Title:
銅薄膜の化学的気相成長法
Document Type and Number:
Japanese Patent JP4717202
Kind Code:
B2
Inventors:
Yoshiro Kusumoto
Shinro Murata
Ichihashi Motoko
Shuji Osono
Shinro Murata
Ichihashi Motoko
Shuji Osono
Application Number:
JP2000390346A
Publication Date:
July 06, 2011
Filing Date:
December 22, 2000
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/14; C23C16/18; H01L21/28; H01L21/285
Domestic Patent References:
| JP7321039A | ||||
| JP8139030A | ||||
| JP2000195863A | ||||
| JP2000332020A | ||||
| JP2000297371A |
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Etsuo Machida
Shinichi Abe
Yuji Tsujida
Etsuo Machida