Title:
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD
Document Type and Number:
Japanese Patent JP2010134285
Kind Code:
A
Abstract:
To provide a positive resist composition which exhibits high sensitivity, ensures no substrate dependency, and excels in profile configuration even when a basic substrate is used, and a pattern forming method using the positive resist composition.
The chemically amplified positive resist composition contains a compound (N) having at least one diazo group and at least one group which decomposes under the action of an acid to thereby generate an alkali-soluble group. The pattern forming method using the positive resist composition is also provided.
Inventors:
HIRANO SHUJI
Application Number:
JP2008311535A
Publication Date:
June 17, 2010
Filing Date:
December 05, 2008
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
G03F7/039; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa