Title:
化学増幅型ホトレジスト組成物、レジスト層積層体およびレジストパタ-ン形成方法
Document Type and Number:
Japanese Patent JP4828201
Kind Code:
B2
Inventors:
Koji Saito
Hideo Haneda
Yasushi Washio
Hideo Haneda
Yasushi Washio
Application Number:
JP2005304123A
Publication Date:
November 30, 2011
Filing Date:
October 19, 2005
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/038; G03F7/004; H01L21/027; C07C381/12
Domestic Patent References:
| JP2001281863A | ||||
| JP2005527003A | ||||
| JP2005194475A | ||||
| JP2006145853A | ||||
| JP10007649A | ||||
| JP2005187799A |
Foreign References:
| WO2004029037A1 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai