Title:
化学増幅型レジスト組成物
Document Type and Number:
Japanese Patent JP4449176
Kind Code:
B2
Abstract:
A resist composition comprising a binder resin and a radiation-sensitive compound. The binder resin is an alkali-soluble resin or becomes alkali-soluble resin by the action of the radiation-sensitive compound after irradiation, and has a polymerization unit represented by the following formula (I):wherein, R1 represents a fluoroalkyl group having 1 to 12 carbon atoms and having at least one fluorine atom, and R2 represents hydrogen atom or an acyl group having 2 to 5 carbon atoms.
Inventors:
Kazuhiko Hashimoto
Yoshiko Miya
Yoshiko Miya
Application Number:
JP2000198916A
Publication Date:
April 14, 2010
Filing Date:
June 30, 2000
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; C08F16/04; C08F18/02; C08K5/00; C08L29/02; C08L31/02; G03F7/004; G03F7/038; H01L21/027
Domestic Patent References:
| JP2001133979A | ||||
| JP2001356480A | ||||
| JP9297396A | ||||
| JP11242345A | ||||
| JP11072922A | ||||
| JP2278265A | ||||
| JP62108845A | ||||
| JP2000137327A | ||||
| JP2002525683A |
Attorney, Agent or Firm:
Toru Nakayama