Title:
化学増幅レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4110392
Kind Code:
B2
Inventors:
Yoichi Osawa
Katsuhiro Kobayashi
Katsuya Takemura
Junji Tsuchiya
Maeda Kazunori
Katsuhiro Kobayashi
Katsuya Takemura
Junji Tsuchiya
Maeda Kazunori
Application Number:
JP2003027861A
Publication Date:
July 02, 2008
Filing Date:
February 05, 2003
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/004; C07C309/75; C09K3/00; G03F7/039; H01L21/027
Domestic Patent References:
| JP2000314956A | ||||
| JP2000066405A | ||||
| JP2000194127A | ||||
| JP2001106669A | ||||
| JP2002508774A | ||||
| JP2002202610A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Saori Shigematsu
Katsunari Kobayashi