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Title:
化学吸着膜およびその製造方法
Document Type and Number:
Japanese Patent JP3597974
Kind Code:
B2
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Inventors:
Kazufumi Ogawa
Application Number:
JP22542497A
Publication Date:
December 08, 2004
Filing Date:
August 21, 1997
Export Citation:
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Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G02F1/1337; B01J19/00; B01J19/12; B05D5/06; B32B27/00; C03C17/30; C08J5/18; C08L83/10; C09D183/04; (IPC1-7): B01J19/00; B01J19/12; B05D5/06; C03C17/30; C08L83/10; C09D183/04
Domestic Patent References:
JP8262452A
JP6230394A
Attorney, Agent or Firm:
Hiroyuki Ikeuchi
Kimihiro Sato



 
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