PURPOSE: To preceisely judge attachment of chips at high speed by making only a picture image data corresponding to a chip attanchment detection objective area as a picture image data of a chip attachment detection object and judging existence of the chips in the chip attachment detection objective area from this picture image data.
CONSTITUTION: Only a picture image data corresponding to a chip attachment detection objective area memorized in a chip attachment detection objective area setting memory part 21 is extracted as a digital picture image data of a chip attachment detection object from a digital picture image data of the overall image pickup space after using a cutting tool T by a CCD camera 9 by a chip existence judging part 23, and a signal value is scanned and retrieved for each of picture images concerning this digital picture image data. When a region capturing a picture image by reflected light is more than a continuous specified area, it is judged as chips and a chip attachment detection signal is output.
KAKUHARI KATSUJI
ENDO HIROHARU
HAGIWARA HIROSHI
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