PURPOSE: To facilitate the fine adjustment of a bonding machine, by making a cam follower fixed to a chip stage driving table capable of freely elevating follow a cam fixed to a Z-axis driving motor of a chip stage driver.
CONSTITUTION: The Z-axis driving of a chip stage 16 is transmitted via a cam follower 29, by a rotary cam 28 connected with a Z-axis driving motor 25 via a coupling 27. That is, when a chip stage Z-axis driving motor 25 rotates, a rotary cam 28 rotates. The cam follower 29 moves up and down according to the shape of the rotary cam 28. Thereby a sheeter table 24 connected with the cam follower 29 is moved up and down along a cross table 23, and a chip stage 16 arranged on the sheeter table 24 is moved up and down. Hence fine adjustment is facilitated by inputting the numerical value of the height of the Z-axis.
KOBAYASHI TATSUHARU
MATSUMOTO YASUHISA
| JPH0353193A | 1991-03-07 | |||
| JPS5143675A | 1976-04-14 |
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