Title:
CHROMATIC CONFOCAL MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2021015122
Kind Code:
A
Abstract:
To provide a cost-effective light source suitable for high frequency driving of a chromatic confocal linear detector.SOLUTION: A chromatic confocal measuring device for measuring intervals and/or thickness of a plurality of locations has a light source (1) that emits polychromatic measuring light (2), at least one first confocal aperture (3 and 10) through which the measuring light (2) passes, and number of punctiform orifices or at least one slit-shaped orifice. An imaging optical system (4 and 5) is configured to cause a chromatic focus shift of the measuring light and various wavelengths are focused at various heights. A first receiving and evaluating unit (8) is formed to measure intensity of the measuring light reflected by a measurement object according to the wavelengths and a transversal position of a reflection location on the measurement object and determine the intervals and/or the thicknesses of the plurality of locations of the measurement object (6). The light source (1) is a laser pumped luminophore-based light source and has a vertically long exit surface.SELECTED DRAWING: Figure 1
Inventors:
MARTIN SCHOENLEBER
Application Number:
JP2020117642A
Publication Date:
February 12, 2021
Filing Date:
July 08, 2020
Export Citation:
Assignee:
PRECITEC OPTRONIK GMBH
International Classes:
G01B11/02; G01B11/06; G02B6/26
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Koichi Ito
Kentaro Ito
Keiji Akagi
Shinji Mitsuhashi
Koichi Ito
Kentaro Ito
Keiji Akagi