Title:
CHUCK DEVICE FOR FINE CONTACT
Document Type and Number:
Japanese Patent JP2002326179
Kind Code:
A
Abstract:
To accurately position a fine contact and hold the contact with a strong holding force.
Component parts are formed in plate shapes, and the shaped parts are stuck in stacked state to form a fine contact fixed part 18. A fine contact 2 is directly sucked by a suction from an opening part 15 provided in the contact part 5a of the fine contact fixed part 18, holdingly grasped by a claw part 8a provided so as to be moved close to and away from a projected part 4a, and fixed so as to be matched with the shape of the contact part 5a.
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Inventors:
Kamiya, Masakazu
Application Number:
JP2001000128332
Publication Date:
November 12, 2002
Filing Date:
April 25, 2001
Export Citation:
Assignee:
ANDO ELECTRIC CO LTD
International Classes:
B25J15/06; B25J15/08; H01L21/66; B25J15/06; B25J15/08; H01L21/66; (IPC1-7): B25J15/06; B25J15/08; H01L21/66