Title:
チャックテーブルの原点高さ位置検出方法
Document Type and Number:
Japanese Patent JP5261125
Kind Code:
B2
Inventors:
Nakayama Hidekazu
Application Number:
JP2008264506A
Publication Date:
August 14, 2013
Filing Date:
October 10, 2008
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/10; H01L21/301; H01L21/304
Domestic Patent References:
| JP62144156U | ||||
| JP63102872A | ||||
| JP2005166969A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki