To provide a circle line type vacuum deposition apparatus performing delivery of the base material automatically and capable of improving the production efficiency.
The circle line type vacuum deposition apparatus is equipped with a load lock chamber 11 having an inner opening to be open to inside a vacuum chamber 10 and an outer opening to be open to outside the vacuum chamber, a first transporting means 15 having a gate valve 17 able to close the inner opening when the base material 8 is carried into and out of the load lock chamber, and a second transporting means 4 having a door valve 6 able to close the outer opening when the base material is carried into and out of the load lock chamber, wherein the first and second transporting means are furnished with respective base material holding means 31 and 32 capable of handing over the base material from the one to the other in the condition that the the gate valve of the first transporting means and the door valve of the second transporting means close the inner and outer openings in the load lock chamber, respectively.
FUKUDA YOSHICHIKA
Yasu Furukawa