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Patent Searching and Data


Title:
CIRCUIT INSPECTION DEVICE AND PROBE DRIVING METHOD
Document Type and Number:
Japanese Patent JPH10153622
Kind Code:
A
Abstract:

To provide the circuit inspection device, which can operate only the required probe in the probes using compressed fluid.

A printed wiring 9, which is connected to an inspection circuit, and a through-hole electrode 10 are formed at the surface of a substrate 5. A cylinder accepting part 1 made of metal is attached to the through-hole electrode 10. A piston/cylinder mechanism having a cylinder part 2 and a piston part 3 are inserted into the accepting part 1. A probe 4 is provided at the top of the piston part 3 has a continuity with the cylinder accepting part 1. At the right and left cylinder mechanisms, compressed air is guided into the right and left cylinder mechanisms from separate flow paths 8a and 8b, and the piston part 3 is driven. The probe to be operated can be selected by the selection of the flow path giving the compressed air.


Inventors:
KUBODERA TADASHI
Application Number:
JP31515396A
Publication Date:
June 09, 1998
Filing Date:
November 26, 1996
Export Citation:
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Assignee:
FUJI XEROX CO LTD
International Classes:
G01R31/02; G01R31/28; G02F1/1333; G01R1/06; (IPC1-7): G01R1/06; G01R31/02; G01R31/28; G02F1/1333
Attorney, Agent or Firm:
Yasuo Ishii (1 outside)